New Power Supply- New Instructions

Nancy Latta nlatta at stanford.edu
Fri Sep 2 11:10:22 PDT 2011


Folks,

After many hours of work and head scratching Jim McVittie has installed 
a new RF power supply that will go to full power and tune nicely.  There 
are, however, new instructions for turning on and tuning the power 
supply.  Please see below.  The instructions will be posted on the 
etcher and noted in the operation instructions at the tool.  This may be 
a temporary state as we may be ordering a newer more powerful RF power 
supply.

Turn on POWER on the RF power supply.
The following buttons should be on;
FORWARD POWER
REMOTE CONTROL
REMOTE SIGNAL
The following buttons should be off;
RIGHT DISPLAY
LEFT DISPLAY
SETPOINT
When the plasma is on RF ON should be lit.
When the plasma is off RF should be lit.
Tuning;
Adjust the coil pot only.
Use the bird meter (located above the tuning pots).  Make sure the arrow 
is pointing left.
The old black box on the loading station may be used for gross tuning.
The most accurate froward and reverse power readings are on the power 
supply itself.
Write down the numbers on the coil and cap pots so that you can get 
close to perfect tuning the next time you use the etcher.

-Team Etch



More information about the drytek2 mailing list