Drytek2 gas flow

Pengyu Fan fanpy839 at stanford.edu
Wed Mar 7 12:10:30 PST 2012

Hi All,

I had this problem when I ran my process on drytek2: I tried to use process
3 with SF6 and O2 for nitride etching, but somehow the flow meter does not
show any reading for SF6 (O2 reading is working). I made sure the correct
process was chosen, the SF6 valve was open and the correct gas was switched
on (2 and 4). Did I miss something here?

Thank you so much! I really appreciate your help!

Pengyu Fan
PhD Candidate
Brongersma Group
Materials Science & Engineering
Stanford University
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