From wslee at stanford.edu  Tue Sep 18 12:57:59 2012
From: wslee at stanford.edu (Scott Lee)
Date: Tue, 18 Sep 2012 12:57:59 -0700
Subject: Drytek Usage: Input Requested
Message-ID: <CAC8qUHBeWjuheGgExS0+O3Gg9-kJWBRA110yZJnyGGR7i8P=Og@mail.gmail.com>

Hello Drytek Users,

SNF is in the process of looking at buying new tools to eventually replace
the vintage Drytek etchers in SNF. We want to ensure that the current
processes can be supported on the new tools. Respond to Scott at
wslee at stanford.edu with your Drytek processing requirements. We would like
to know:

(1) what material do you etch in Drytek?
(2) what is your masking material?
(3) what are your cleanliness requirements?
(3) what process gases do you need?
(4) what typical etch power do you use?
(5) any other features you would like to see on the tool?

Please respond within a week by 9/25. We are looking at purchasing the tool
in the next couple weeks.

Thanks,
SNF User Adcom
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From dgrbovic at snf.stanford.edu  Tue Sep 18 15:04:40 2012
From: dgrbovic at snf.stanford.edu (Dragoslav Grbovic)
Date: Tue, 18 Sep 2012 15:04:40 -0700
Subject: Drytek Usage: Input Requested
In-Reply-To: <CAC8qUHBeWjuheGgExS0+O3Gg9-kJWBRA110yZJnyGGR7i8P=Og@mail.gmail.com>
References: <CAC8qUHBeWjuheGgExS0+O3Gg9-kJWBRA110yZJnyGGR7i8P=Og@mail.gmail.com>
Message-ID: <CAJzg01dp4ZKjjqRcujXv53w2mcp-jALK+2bOf8zTbJ3RwX5r-g@mail.gmail.com>

On Tue, Sep 18, 2012 at 12:57 PM, Scott Lee <wslee at stanford.edu> wrote:

> Hello Drytek Users,
>
> SNF is in the process of looking at buying new tools to eventually replace
> the vintage Drytek etchers in SNF. We want to ensure that the current
> processes can be supported on the new tools. Respond to Scott at
> wslee at stanford.edu with your Drytek processing requirements. We would
> like to know:
>
> (1) what material do you etch in Drytek?
>
silicon oxide, silicon nitride

>
>
(2) what is your masking material?
>
spr


> (3) what are your cleanliness requirements?
>
dirty

(3) what process gases do you need?
> (4) what typical etch power do you use?
> (5) any other features you would like to see on the tool?
>
> Please respond within a week by 9/25. We are looking at purchasing the
> tool in the next couple weeks.
>
> Thanks,
> SNF User Adcom
>
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From usharaghuram at gmail.com  Tue Sep 18 15:35:50 2012
From: usharaghuram at gmail.com (Usha Raghuram)
Date: Tue, 18 Sep 2012 15:35:50 -0700
Subject: Drytek Usage: Input Requested
In-Reply-To: <CAC8qUHBeWjuheGgExS0+O3Gg9-kJWBRA110yZJnyGGR7i8P=Og@mail.gmail.com>
References: <CAC8qUHBeWjuheGgExS0+O3Gg9-kJWBRA110yZJnyGGR7i8P=Og@mail.gmail.com>
Message-ID: <2E38AF7E-3334-4DD6-96EE-639C1B385B29@gmail.com>

Scott,

Our use for Dryteks are mainly for descum and passivation type etches.  And so, a generic oxide etcher with fluorocarbon chemistries and gases such as SF6, Ar will work.  We would also like to see capability to process 6" wafers.  If we can add to the wish list, if we can have high aspect ratio contact etch capability (C5F10/ O2 type chemistries), that will be great.

Regards,

Usha

Sent from my iPhone

On Sep 18, 2012, at 12:57 PM, Scott Lee <wslee at stanford.edu> wrote:

> Hello Drytek Users,
> 
> SNF is in the process of looking at buying new tools to eventually replace the vintage Drytek etchers in SNF. We want to ensure that the current processes can be supported on the new tools. Respond to Scott at wslee at stanford.edu with your Drytek processing requirements. We would like to know: 
> 
> (1) what material do you etch in Drytek?
> (2) what is your masking material?
> (3) what are your cleanliness requirements?
> (3) what process gases do you need? 
> (4) what typical etch power do you use? 
> (5) any other features you would like to see on the tool?
> 
> Please respond within a week by 9/25. We are looking at purchasing the tool in the next couple weeks.
> 
> Thanks,
> SNF User Adcom 
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