From booth at snf.stanford.edu  Thu May 30 03:23:41 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 30, 2002 3:23:41 PM
Subject: Shutdown drytek4 2002-04-26 10:59:47: Repair endpoint monitor
Message-ID: <mailman.46.1357938321.25694.drytek4-pcs@snf.stanford.edu>

repaired & aligned endpoint monitor.
repaired vacuum & water leaks.
replaced leaky manometer isolation valve
replaced leaky wafer lift diaphram.
Leak Rate less than 1 mT/min
Ran 30 min O2 plasma.