From zlrao at snf.stanford.edu Sun Aug 3 12:09:36 2003 From: zlrao at snf.stanford.edu (zlrao at snf.stanford.edu) Date: Aug 3, 2003 12:09:36 PM Subject: Problem drytek4 2003-08-03 12:09:34: Report Problem for drytek4 Message-ID: Cooling water is below the marked level!!! From cbaxter at snf.stanford.edu Mon Aug 4 11:54:00 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 4, 2003 11:54:00 AM Subject: Problem drytek4 2003-08-03 12:09:34: Report Clear for drytek4 Message-ID: flush line with cda. now both top and bottom electrode nas cooling flow From hphan at snf.stanford.edu Tue Aug 19 17:43:49 2003 From: hphan at snf.stanford.edu (Henry Phan) Date: Tue, 19 Aug 2003 17:43:49 -0700 Subject: GaN Etch Message-ID: <3F42C445.F790F086@snf.stanford.edu> Dear Users, I would like to run a GaN etch process in Drytek4. Does anyone has a specific recipe? Any information would be greatly appreciated. -- Henry _ _ _ _ Henry Q. Phan Stanford Nanofabrication Facility CIS Room 146, Mail Code 4070 Stanford, CA 94305 (650)725-3659 hphan at snf.stanford.edu From mcvittie at cis.Stanford.EDU Tue Aug 19 18:40:56 2003 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Tue, 19 Aug 2003 18:40:56 -0700 (PDT) Subject: GaN Etch In-Reply-To: <3F42C445.F790F086@snf.stanford.edu> Message-ID: Henry, I would think the PlasmaQuest is the proper tool for GaN. You need Cl2 or some other Cl source to etch GaN. With gases availablew in Drytek4, all you can do is sputter etch GaN. Jim On Tue, 19 Aug 2003, Henry Phan wrote: > Dear Users, > I would like to run a GaN etch process in Drytek4. Does anyone has a > specific recipe? Any information would be greatly appreciated. > > -- > Henry > _ _ _ _ > Henry Q. Phan > Stanford Nanofabrication Facility > CIS Room 146, Mail Code 4070 > Stanford, CA 94305 > (650)725-3659 > hphan at snf.stanford.edu > > > -- -------------------------------------------------------------- James P. McVittie, Ph.D. SNF Director of Technology Allen Center for Integrated Systems Stanford Nanofabrication Facility Stanford University jmcvittie at stanford.edu Rm. 336, 330 Serra Mall Fax: (650) 723-4659 Stanford, CA 94305-4075 Tel: (650) 725-3640 From afreeman at snf.stanford.edu Sat Aug 30 05:39:28 2003 From: afreeman at snf.stanford.edu (afreeman at snf.stanford.edu) Date: Aug 30, 2003 5:39:28 PM Subject: Problem drytek4 2003-08-30 17:39:27: Report Problem for drytek4 Message-ID: was hard to set up the reflected power to stay under 5W. Noticed it to be oscillating. Abandoned the process after smelling someting in the middle of the process.