GaN Etch

Henry Phan hphan at
Tue Aug 19 17:43:49 PDT 2003

Dear Users,
I would like to run a GaN etch process in Drytek4. Does anyone has a
specific recipe? Any information would be greatly appreciated.

_ _ _ _
Henry Q. Phan
Stanford Nanofabrication Facility
CIS Room 146, Mail Code 4070
Stanford, CA  94305
hphan at

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