From sabnis at snf.stanford.edu Fri Jan 17 11:10:41 2003 From: sabnis at snf.stanford.edu (sabnis at snf.stanford.edu) Date: Jan 17, 2003 11:10:41 AM Subject: Problem drytek4 2003-01-17 11:10:39: drytek4 nitride etching Message-ID: Last night I used the drytek4 to etch SiN off of my wafers. Recipe: 100 sccm SF6, 150 mTorr, - 30 V bias (~120 W), etch rate 2000-2500 A/min. This recipe has been rock solid since about last April or May (after Len did major repairs on the machine). In the week just before the lab holiday shutdown, I believe the showerhead and chamber were wiped down to remove the built up polymer, etc. I used the machine after it was cleaned that week and noticed that my bias and etch rate had dropped to one half their usual values. Fortuntaely I was able to get my samples etched. Last night I used the machine for the first time this month and got terrible results. The etch rate was very inconsistent and the uniformity over the wafer was terrible - in some places etching occurred and in other places there was no etching. I believe that something has changed since the cleaning in December. Could someone please take a look at the machine ? I can provide SiN test samples. Other minor point - we need more logsheets - the notebook is full. Thanks. - vijit sabnis From hphan at snf.stanford.edu Tue Jan 21 02:18:27 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jan 21, 2003 2:18:27 PM Subject: Problem drytek4 2003-01-17 11:10:39: drytek4 nitride etching Message-ID: I ran a nitride etch last Friday, the uniformity looks ok. I think we need more seasoning in order to get a high etch rate. From volkan at snf.stanford.edu Fri Jan 24 11:10:40 2003 From: volkan at snf.stanford.edu (volkan at snf.stanford.edu) Date: Jan 24, 2003 11:10:40 AM Subject: Problem drytek4 2003-01-24 11:10:39: standby LED Message-ID: Drytek4 standby indicator LED is not lit (altough it is in the standby mode [at 234mTorr]). From booth at snf.stanford.edu Mon Jan 27 07:18:05 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 27, 2003 7:18:05 AM Subject: Problem drytek4 2003-01-24 11:10:39: standby LED Message-ID: replaced bad bulb.