Problem drytek4 2003-01-17 11:10:39: drytek4 nitride etching

hphan at snf.stanford.edu hphan at snf.stanford.edu
Tue Jan 21 02:18:27 PST 2003


I ran a nitride etch last Friday, the uniformity looks ok. I think we need more seasoning in order to get a high etch rate. 




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