From alissa at snf.stanford.edu  Wed Apr  7 13:51:50 2004
From: alissa at snf.stanford.edu (alissa at snf.stanford.edu)
Date: Wed, 7 Apr 2004 13:51:50 -0700
Subject: Comment drytek4 2004-04-07 13:51:49: lots o' particles
Message-ID: <mailman.126.1357938322.25694.drytek4-pcs@snf.stanford.edu>

lots of big particles deposited on my wafer after etching, chamber seems dirty



From jperez at snf.stanford.edu  Tue Apr 13 10:46:20 2004
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 13 Apr 2004 10:46:20 -0700
Subject: Shutdown drytek4 2004-04-13 10:46:19: Lower Electrode water flow stem is on the bottom
Message-ID: <mailman.127.1357938322.25694.drytek4-pcs@snf.stanford.edu>




From crichter at snf.stanford.edu  Tue Apr 27 14:52:12 2004
From: crichter at snf.stanford.edu (crichter at snf.stanford.edu)
Date: Tue, 27 Apr 2004 14:52:12 -0700
Subject: Problem drytek4 2004-04-27 14:52:11: no lower electrode water flow
Message-ID: <mailman.128.1357938322.25694.drytek4-pcs@snf.stanford.edu>




From crichter at snf.stanford.edu  Tue Apr 27 14:53:59 2004
From: crichter at snf.stanford.edu (crichter at snf.stanford.edu)
Date: Tue, 27 Apr 2004 14:53:59 -0700
Subject: Shutdown drytek4 2004-04-27 14:53:59: no lower electrode water flow
Message-ID: <mailman.129.1357938322.25694.drytek4-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Tue Apr 27 17:57:13 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 27 Apr 2004 17:57:13 -0700
Subject: Shutdown drytek4 2004-04-27 14:53:59: no lower electrode water flow
Message-ID: <mailman.130.1357938322.25694.drytek4-pcs@snf.stanford.edu>

flush cooling lines



From cbaxter at snf.stanford.edu  Tue Apr 27 17:57:20 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 27 Apr 2004 17:57:20 -0700
Subject: Problem drytek4 2004-04-27 14:52:11: no lower electrode water flow
Message-ID: <mailman.131.1357938322.25694.drytek4-pcs@snf.stanford.edu>