From jperez at snf.stanford.edu Fri Feb 6 15:20:52 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 Feb 2004 15:20:52 -0800 Subject: Shutdown drytek4 2004-02-06 15:20:51: water flow low Message-ID: The lower electrode water flow is low From cbaxter at snf.stanford.edu Fri Feb 6 16:16:10 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 6 Feb 2004 16:16:10 -0800 Subject: Shutdown drytek4 2004-02-06 15:20:51: water flow low Message-ID: flush cooling line From jperez at snf.stanford.edu Tue Feb 10 14:28:18 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 10 Feb 2004 14:28:18 -0800 Subject: Problem drytek4 2004-02-10 14:28:09: Lower electrode water flow is low Message-ID: This flow meter is too hard to tell if level is good enough to run. Doesn't reach its mark. From cbaxter at snf.stanford.edu Tue Feb 10 23:49:42 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 10 Feb 2004 23:49:42 -0800 Subject: Problem drytek4 2004-02-10 14:28:09: Lower electrode water flow is low Message-ID: balance the cooling water flow between top and lower electrode From ofidaner at snf.stanford.edu Fri Feb 13 10:43:44 2004 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Fri, 13 Feb 2004 10:43:44 -0800 Subject: Problem drytek4 2004-02-13 10:43:43: standby mode Message-ID: The pressure does not go up to ~200mTorr level. From alissa at snf.stanford.edu Fri Feb 13 11:28:47 2004 From: alissa at snf.stanford.edu (alissa at snf.stanford.edu) Date: Fri, 13 Feb 2004 11:28:47 -0800 Subject: Problem drytek4 2004-02-13 11:28:46: vac pump off line? Message-ID: I just vented the chamber and put it back into standby to check ofidaner's comment. It doesn't seem like the pump is coming on at all - i.e I don't think the chamber is pumping out. From mcvittie at snf.stanford.edu Fri Feb 13 12:59:24 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Fri, 13 Feb 2004 12:59:24 -0800 Subject: Problem drytek4 2004-02-13 10:43:43: standby mode Message-ID: From mcvittie at snf.stanford.edu Fri Feb 13 12:59:33 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Fri, 13 Feb 2004 12:59:33 -0800 Subject: Problem drytek4 2004-02-13 11:28:46: vac pump off line? Message-ID: From alissa at snf.stanford.edu Sat Feb 14 08:19:49 2004 From: alissa at snf.stanford.edu (alissa at snf.stanford.edu) Date: Sat, 14 Feb 2004 08:19:49 -0800 Subject: Problem drytek4 2004-02-14 08:19:49: chamber lid won't lift Message-ID: after venting chamber - the lid lifts a few millimeters off the seal, but won't lift up all the way From mcvittie at snf.stanford.edu Tue Feb 17 16:46:54 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 17 Feb 2004 16:46:54 -0800 Subject: Problem drytek4 2004-02-14 08:19:49: chamber lid won't lift Message-ID: Cleaned chamber o-ring and increased flow to lifter. Jim From gigi at snf.stanford.edu Wed Feb 18 15:35:55 2004 From: gigi at snf.stanford.edu (gigi at snf.stanford.edu) Date: Wed, 18 Feb 2004 15:35:55 -0800 Subject: Problem drytek4 2004-02-18 15:35:54: O-ring gets sticky Message-ID: O-ring position needs ti be checked at every run, otherwise it may not seal the chamber properly From eenriquez at snf.stanford.edu Thu Feb 19 09:06:39 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 Feb 2004 09:06:39 -0800 Subject: Problem drytek4 2004-02-18 15:35:54: O-ring gets sticky Message-ID: Replaced the o-ring.