From jperez at snf.stanford.edu  Tue Jun  8 16:04:05 2004
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 8 Jun 2004 16:04:05 -0700
Subject: Shutdown drytek4 2004-06-08 16:04:05: Lower Electrode water level too low
Message-ID: <mailman.141.1357938322.25694.drytek4-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Tue Jun  8 18:52:29 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 8 Jun 2004 18:52:29 -0700
Subject: Shutdown drytek4 2004-06-08 16:04:05: Lower Electrode water level too low
Message-ID: <mailman.142.1357938322.25694.drytek4-pcs@snf.stanford.edu>

flush cooling line with cda



From true at snf.stanford.edu  Wed Jun  9 14:45:55 2004
From: true at snf.stanford.edu (true at snf.stanford.edu)
Date: Wed, 9 Jun 2004 14:45:55 -0700
Subject: Problem drytek4 2004-06-09 14:45:54: pedestal
Message-ID: <mailman.143.1357938322.25694.drytek4-pcs@snf.stanford.edu>

the pedestal goes up and down during the purge cycle, after an etch is complete. Sometimes, chips are sucked under the pedestal and it crushes them. I use the drytek as a final step and cannot have it crush my chips. Jim, Elmer, says you vetoed my request to disable this. Can we revisit this and you explain what problems you think diabling the pedestal would introduce?



From cbaxter at snf.stanford.edu  Wed Jun  9 19:29:59 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 9 Jun 2004 19:29:59 -0700
Subject: Problem drytek4 2004-06-09 14:45:54: pedestal
Message-ID: <mailman.144.1357938322.25694.drytek4-pcs@snf.stanford.edu>

i disable the air supply for the lifter



From jperez at snf.stanford.edu  Fri Jun 11 15:23:53 2004
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 11 Jun 2004 15:23:53 -0700
Subject: Shutdown drytek4 2004-06-11 15:23:52: The lower electrode water level is at the bottom
Message-ID: <mailman.145.1357938322.25694.drytek4-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Fri Jun 11 19:15:02 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 11 Jun 2004 19:15:02 -0700
Subject: Shutdown drytek4 2004-06-11 15:23:52: The lower electrode water level is at the bottom
Message-ID: <mailman.146.1357938322.25694.drytek4-pcs@snf.stanford.edu>

flush cooling with cda



From crichter at snf.stanford.edu  Wed Jun 16 13:46:53 2004
From: crichter at snf.stanford.edu (crichter at snf.stanford.edu)
Date: Wed, 16 Jun 2004 13:46:53 -0700
Subject: Problem drytek4 2004-06-16 13:46:52: chamber pressure exceeds 200-400 range in standby
Message-ID: <mailman.147.1357938322.25694.drytek4-pcs@snf.stanford.edu>

chamber pressure reading is at 685-696mTorr



From cbaxter at snf.stanford.edu  Wed Jun 16 16:51:03 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 16 Jun 2004 16:51:03 -0700
Subject: Problem drytek4 2004-06-16 13:46:52: chamber pressure exceeds 200-400 range in standby
Message-ID: <mailman.148.1357938322.25694.drytek4-pcs@snf.stanford.edu>

dial down stand by purge valve to 225mt