Problem drytek4 2004-06-09 14:45:54: pedestal

true at snf.stanford.edu true at snf.stanford.edu
Wed Jun 9 14:45:55 PDT 2004


the pedestal goes up and down during the purge cycle, after an etch is complete. Sometimes, chips are sucked under the pedestal and it crushes them. I use the drytek as a final step and cannot have it crush my chips. Jim, Elmer, says you vetoed my request to disable this. Can we revisit this and you explain what problems you think diabling the pedestal would introduce?




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