March 2004 Archives by date

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Starting: Mon Mar 1 13:27:44 PST 2004
Ending: Tue Mar 30 21:06:13 PST 2004
Messages: 19

• Problem drytek4 2004-03-01 13:27:43: no lower electrode water flow   nhelman at snf.stanford.edu
• Problem drytek4 2004-03-01 17:52:44: Ar mfc unstable   cmfaulkn at snf.stanford.edu
• Problem drytek4 2004-03-01 17:52:44: Ar mfc unstable   cbaxter at snf.stanford.edu
• Problem drytek4 2004-03-01 13:27:43: no lower electrode water flow   cbaxter at snf.stanford.edu
• Problem drytek4 2004-03-04 21:36:32: problem   topinka at snf.stanford.edu
• Problem drytek4 2004-03-04 21:36:32: problem   cbaxter at snf.stanford.edu
• Shutdown drytek4 2004-03-05 15:51:57: Gases won't turn on   eenriquez at snf.stanford.edu
• Shutdown drytek4 2004-03-05 15:51:57: Gases won't turn on   eenriquez at snf.stanford.edu
• Problem drytek4 2004-03-11 14:15:54: unstable flow rates for SF6   crichter at snf.stanford.edu
• Problem drytek4 2004-03-11 15:14:00: chamber has pungent smell after etching   crichter at snf.stanford.edu
• Problem drytek4 2004-03-11 14:15:54: unstable flow rates for SF6   cbaxter at snf.stanford.edu
• Problem drytek4 2004-03-11 15:14:00: chamber has pungent smell after etching   cbaxter at snf.stanford.edu
• Problem drytek4 2004-03-22 13:30:50: Water flow too low   vossough at snf.stanford.edu
• Shutdown drytek4 2004-03-22 13:36:59: Lower electrode water flow is below mark   jperez at snf.stanford.edu
• Shutdown drytek4 2004-03-22 13:36:59: Lower electrode water flow is below mark   cbaxter at snf.stanford.edu
• Problem drytek4 2004-03-22 13:30:50: Water flow too low   cbaxter at snf.stanford.edu
• Comment drytek4 2004-03-23 07:33:25: Do not use freon 318   eenriquez at snf.stanford.edu
• Shutdown drytek4 2004-03-26 15:00:21: Lower electrode water flow is too low to operate   jperez at snf.stanford.edu
• Shutdown drytek4 2004-03-26 15:00:21: Lower electrode water flow is too low to operate   cbaxter at snf.stanford.edu

Last message date: Tue Mar 30 21:06:13 PST 2004
Archived on: Fri Jan 11 13:05:35 PST 2013

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