From vossough at snf.stanford.edu Wed Nov 10 22:46:40 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Wed, 10 Nov 2004 22:46:40 -0800 Subject: Problem drytek4 SNF 2004-11-10 22:46:40: Lower electrode cooling flow Message-ID: reads zero. From jperez at snf.stanford.edu Thu Nov 11 08:09:55 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 11 Nov 2004 08:09:55 -0800 Subject: Comment drytek4 SNF 2004-08-21 14:30:25: found machine with maint toggle switch in "no vent" position Message-ID: After purge and seasoned everything worked OK. From jperez at snf.stanford.edu Thu Nov 11 08:10:57 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 11 Nov 2004 08:10:57 -0800 Subject: Problem drytek4 SNF 2004-11-10 22:46:40: Lower electrode cooling flow Message-ID: Check flow on lower electrode this morning and was reading normal. From jperez at snf.stanford.edu Thu Nov 11 10:01:31 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 11 Nov 2004 10:01:31 -0800 Subject: Shutdown drytek4 SNF 2004-11-11 10:01:30: Drytek 4 pressure wouldn't drop to 20 mTorr Message-ID: Trying to purge lines with CHF3 and O2, but pressure wouldn't drop to 20 mTorr. Elmer switched off dip rocker 4 (O2) leaving 3 on and pressure dropped, then switched off dip rocker 3 (leaving 4 on) pressure wouldn't drop. Possible O2 leak. From eenriquez at snf.stanford.edu Thu Nov 11 15:46:50 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 11 Nov 2004 15:46:50 -0800 Subject: Shutdown drytek4 SNF 2004-11-11 10:01:30: Drytek 4 pressure wouldn't drop to 20 mTorr Message-ID: No leak. Just needed to increase the flow meter setting to 100% instead of 10%.