Shutdown drytek4 SNF 2004-11-11 10:01:30: Drytek 4 pressure wouldn't drop to 20 mTorr

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Nov 11 10:01:31 PST 2004


Trying to purge lines with CHF3 and O2, but pressure wouldn't drop to 20 mTorr. Elmer switched off dip rocker 4 (O2) leaving
3 on and pressure dropped, then switched off dip 
rocker 3 (leaving 4 on) pressure wouldn't drop. Possible
 O2 leak.




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