From jperez at snf.stanford.edu Mon Aug 1 09:35:58 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 1 Aug 2005 09:35:58 -0700 Subject: Problem drytek4 SNF 2005-08-01 09:35:58: Wafer moving from center position during pumpdown Message-ID: There is a broken quartz tube on the back sidewall. For good uniformity wafer should sit in the center of chamber while plasma is on. From eenriquez at snf.stanford.edu Mon Aug 1 14:06:36 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Aug 2005 14:06:36 -0700 Subject: Problem drytek4 SNF 2005-08-01 09:35:58: Wafer moving from center position during pumpdown Message-ID: Adjusted chuck loader platform speed. The broken quartz tubing is OK. It's solid on the other end. It's just a plug to seal one of the unused ports . From lzhang at snf.stanford.edu Wed Aug 3 16:25:14 2005 From: lzhang at snf.stanford.edu (lzhang at snf.stanford.edu) Date: Wed, 3 Aug 2005 16:25:14 -0700 Subject: Problem drytek4 SNF 2005-08-03 16:25:13: RF light burnt out but runs OK Message-ID: From cbaxter at snf.stanford.edu Wed Aug 3 17:26:30 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 3 Aug 2005 17:26:30 -0700 Subject: Problem drytek4 SNF 2005-08-03 16:25:13: RF light burnt out but runs OK Message-ID: repaired broken wire on rf on neon bulb. From cwhicks at snf.stanford.edu Wed Aug 17 10:54:35 2005 From: cwhicks at snf.stanford.edu (cwhicks at snf.stanford.edu) Date: Wed, 17 Aug 2005 10:54:35 -0700 Subject: Comment drytek4 SNF 2005-08-17 10:54:34: Message-ID: The chamber lid is rising more slowly than usual and does not go up all the way. From cwhicks at snf.stanford.edu Thu Aug 25 17:10:31 2005 From: cwhicks at snf.stanford.edu (cwhicks at snf.stanford.edu) Date: Thu, 25 Aug 2005 17:10:31 -0700 Subject: Comment drytek4 SNF 2005-08-25 17:10:30: Message-ID: The knob for the freon valve needs tightening.