Problem drytek4 SNF 2005-08-01 09:35:58: Wafer moving from center position during pumpdown

jperez at snf.stanford.edu jperez at snf.stanford.edu
Mon Aug 1 09:35:58 PDT 2005


There is a broken quartz tube on the back sidewall. For good 
uniformity wafer should sit in the center of chamber while           plasma is on.




More information about the drytek4-pcs mailing list