Problem drytek4 SNF 2005-08-01 09:35:58: Wafer moving from center position during pumpdown

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Aug 1 14:06:36 PDT 2005


Adjusted chuck loader platform speed.  The broken quartz tubing is OK.  It's solid on the other end.  It's just a plug to seal one of the unused ports .




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