From hansj at snf.stanford.edu  Thu Dec  8 13:10:29 2005
From: hansj at snf.stanford.edu (hansj at snf.stanford.edu)
Date: Thu, 8 Dec 2005 13:10:29 -0800
Subject: Problem drytek4 SNF 2005-12-08 13:10:28: f23 round valve broken
Message-ID: <mailman.231.1357938323.25694.drytek4-pcs@snf.stanford.edu>




From rohank at snf.stanford.edu  Thu Dec  8 17:03:52 2005
From: rohank at snf.stanford.edu (rohank at snf.stanford.edu)
Date: Thu, 8 Dec 2005 17:03:52 -0800
Subject: Problem drytek4 SNF 2005-12-08 17:03:51: CHF3 flow deviation LED red
Message-ID: <mailman.232.1357938323.25694.drytek4-pcs@snf.stanford.edu>

CHF3 deviation button glows up when I try to take the CHF3 flow upto 100 sccm. It did not happen before. The LED comes back to green when I reduce the flow. 
thanks 
rohan



From cbaxter at snf.stanford.edu  Mon Dec 12 10:58:29 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 12 Dec 2005 10:58:29 -0800
Subject: Problem drytek4 SNF 2005-12-08 17:03:51: CHF3 flow deviation LED red
Message-ID: <mailman.233.1357938323.25694.drytek4-pcs@snf.stanford.edu>

zeroed mfc controller



From cbaxter at snf.stanford.edu  Mon Dec 12 11:00:38 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 12 Dec 2005 11:00:38 -0800
Subject: Problem drytek4 SNF 2005-12-08 13:10:28: f23 round valve broken
Message-ID: <mailman.234.1357938323.25694.drytek4-pcs@snf.stanford.edu>

tighten set screw on turn nub.