Problem drytek4 SNF 2005-12-08 17:03:51: CHF3 flow deviation LED red

rohank at snf.stanford.edu rohank at snf.stanford.edu
Thu Dec 8 17:03:52 PST 2005

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CHF3 deviation button glows up when I try to take the CHF3 flow upto 100 sccm. It did not happen before. The LED comes back to green when I reduce the flow. 
thanks 
rohan

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