From gigi at snf.stanford.edu Sun Jul 3 16:27:01 2005 From: gigi at snf.stanford.edu (gigi at snf.stanford.edu) Date: Sun, 3 Jul 2005 16:27:01 -0700 Subject: Problem drytek4 SNF 2005-07-03 16:27:00: leak Message-ID: There is a air leak every time that the chamber is venting/vented. Machine can still be used but Eric suggested to get it fixed before something worse happens. From eenriquez at snf.stanford.edu Tue Jul 5 08:21:12 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 5 Jul 2005 08:21:12 -0700 Subject: Problem drytek4 SNF 2005-07-03 16:27:00: leak Message-ID: replaced leaky pneumatic solenoid for the manometer isolation valve. From jperez at snf.stanford.edu Thu Jul 14 10:03:02 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 14 Jul 2005 10:03:02 -0700 Subject: Problem drytek4 SNF 2005-07-14 10:03:02: Wafer moving in chamber before plasma comes on Message-ID: During pump down the wafer moves and is hanging from center to front /right edge of plate before plasma strikes. From cbaxter at snf.stanford.edu Thu Jul 14 16:29:20 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 14 Jul 2005 16:29:20 -0700 Subject: Problem drytek4 SNF 2005-07-14 10:03:02: Wafer moving in chamber before plasma comes on Message-ID: connected pnumatic air line for chuck lifter. wafer lifter is up when chamber switched under vacuum to prevent wafer from sliding.