Problem drytek4 SNF 2005-07-14 10:03:02: Wafer moving in chamber before plasma comes on

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Jul 14 16:29:20 PDT 2005


connected pnumatic air line for chuck lifter. wafer lifter is 
up when chamber switched under vacuum to prevent wafer
from sliding.




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