From eenriquez at snf.stanford.edu Mon Mar 7 16:04:11 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 7 Mar 2005 16:04:11 -0800 Subject: Shutdown drytek4 SNF 2005-03-07 16:04:10: Controller not working Message-ID: The process does not start when the "cycle start" button is pressed. From cbaxter at snf.stanford.edu Mon Mar 7 21:56:50 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 7 Mar 2005 21:56:50 -0800 Subject: Shutdown drytek4 SNF 2005-03-07 16:04:10: Controller not working Message-ID: The vacuum valve solenoid had a bad coil is not opening the vacuum gate valve, is the reason why system won't cycle start. system needs to do a vacuum/vent sub-routin, before it goes to idle mode. From raldaz at snf.stanford.edu Tue Mar 8 10:06:58 2005 From: raldaz at snf.stanford.edu (raldaz at snf.stanford.edu) Date: Tue, 8 Mar 2005 10:06:58 -0800 Subject: Problem drytek4 SNF 2005-03-08 10:06:57: 10min digit not working for process 1 and 2 Message-ID: The 10min increment digit is not working properly, e.g. if time is set to 10:00 the process will not run. If process time is set to 9min or 19min it will run for 9min only. From eenriquez at snf.stanford.edu Tue Mar 8 13:57:39 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Mar 2005 13:57:39 -0800 Subject: Problem drytek4 SNF 2005-03-08 10:06:57: 10min digit not working for process 1 and 2 Message-ID: Re-seated loose connector. From rohank at snf.stanford.edu Wed Mar 30 15:42:04 2005 From: rohank at snf.stanford.edu (rohank at snf.stanford.edu) Date: Wed, 30 Mar 2005 15:42:04 -0800 Subject: Problem drytek4 SNF 2005-03-30 15:42:03: Black marks on chamber base Message-ID: I am see some black wafer marks on the chamber base. Does not look too bad to me - though it might need some cleaning. I am proceeding with my processing. From cbaxter at snf.stanford.edu Wed Mar 30 18:14:21 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 30 Mar 2005 18:14:21 -0800 Subject: Problem drytek4 SNF 2005-03-30 15:42:03: Black marks on chamber base Message-ID: cleaned black marks