Problem drytek4 SNF 2005-03-30 15:42:03: Black marks on chamber base

rohank at snf.stanford.edu rohank at snf.stanford.edu
Wed Mar 30 15:42:04 PST 2005


I am see some black wafer marks on the chamber base. Does not look too bad to me  - though it might need some cleaning. I am proceeding with my processing.




More information about the drytek4-pcs mailing list