From cbaxter at snf.stanford.edu Tue Apr 4 14:07:11 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 4 Apr 2006 14:07:11 -0700 Subject: Shutdown drytek4 SNF 2006-03-30 11:46:10: Air Leak Message-ID: Showerhead pin hole water leak has been repaired. I run a 30mins o2 plasma and pressure is stable @150 and 300mt/ From crichter at snf.stanford.edu Tue Apr 4 15:22:37 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Tue, 4 Apr 2006 15:22:37 -0700 Subject: Problem drytek4 SNF 2006-04-04 15:22:36: no plasma after dry run Message-ID: From crichter at snf.stanford.edu Tue Apr 4 15:23:39 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Tue, 4 Apr 2006 15:23:39 -0700 Subject: Problem drytek4 SNF 2006-04-04 15:23:38: process pressure less than setpoint Message-ID: Pressure stops at 90mTorr while the setpoint was set at 100mTorr. After about 10 seconds into the process time, the pressure rises up to the setpoint From cbaxter at snf.stanford.edu Tue Apr 4 15:55:01 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 4 Apr 2006 15:55:01 -0700 Subject: Problem drytek4 SNF 2006-04-04 15:23:38: process pressure less than setpoint Message-ID: user a reference vacuu, gauge and adjusted zero manometer reading and set at 10mt reading. From cbaxter at snf.stanford.edu Tue Apr 4 15:55:47 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 4 Apr 2006 15:55:47 -0700 Subject: Problem drytek4 SNF 2006-04-04 15:22:36: no plasma after dry run Message-ID: re-tuned recipe#1 From chaseonline at chaseonline.chase.com Tue Apr 11 08:26:38 2006 From: chaseonline at chaseonline.chase.com (Chase Card Services Online Services Team) Date: Tue, 11 Apr 2006 17:26:38 +0200 Subject: Your online account has been limited Message-ID: <200604111526.k3BFQcJl004757@minden010.server4you.de> An HTML attachment was scrubbed... URL: From cbaxter at snf.stanford.edu Mon Apr 17 11:57:15 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 17 Apr 2006 11:57:15 -0700 Subject: Problem drytek4 SNF 2006-04-13 10:53:19: Lift spring on lid is kinked, near broken--be careful Message-ID: installed new lid extension spring. From jimkruger at snf.stanford.edu Thu Apr 20 16:35:04 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 20 Apr 2006 16:35:04 -0700 Subject: Comment drytek4 SNF 2006-04-20 16:35:04: Manometer isolation valve not working? Message-ID: It looks like the vac. gauge isolation valve stays open on chamber vent. System still works. Maybe I hear a new "hiss" from control air lines? From jimkruger at snf.stanford.edu Thu Apr 20 18:01:19 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 20 Apr 2006 18:01:19 -0700 Subject: Comment drytek4 SNF 2006-04-20 18:01:19: "standby" pilot lamp burned out, I swapped with "cycle hold" lamp. Message-ID: Please replace "cycle hold" lamp. From jimkruger at snf.stanford.edu Mon Apr 24 11:00:34 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 24 Apr 2006 11:00:34 -0700 Subject: Problem drytek4 SNF 2006-04-24 11:00:34: Manometer isolation valve not working Message-ID: Maybe I hear a new contol air "hiss"? "Cycle Hold" lamp still burned out. From eenriquez at snf.stanford.edu Mon Apr 24 23:49:23 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 Apr 2006 23:49:23 -0700 Subject: Problem drytek4 SNF 2006-04-24 11:00:34: Manometer isolation valve not working Message-ID: Replaced solenoid for the manometer isolation valve. Also replaced burnt out "hold" light. From eenriquez at snf.stanford.edu Mon Apr 24 23:49:52 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 Apr 2006 23:49:52 -0700 Subject: Comment drytek4 SNF 2006-04-20 18:01:19: "standby" pilot lamp burned out, I swapped with "cycle hold" lamp. Message-ID: Replaced cycle hold lamp From eenriquez at snf.stanford.edu Mon Apr 24 23:51:05 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 Apr 2006 23:51:05 -0700 Subject: Comment drytek4 SNF 2006-04-20 16:35:04: Manometer isolation valve not working? Message-ID: Hiss was coming from a leaky solenoid valve. Replaced manometer isolation valve solenoid.