Problem drytek4 SNF 2006-04-04 15:23:38: process pressure less than setpoint
crichter at snf.stanford.edu
crichter at snf.stanford.edu
Tue Apr 4 15:23:39 PDT 2006
Pressure stops at 90mTorr while the setpoint was set at 100mTorr. After about 10 seconds into the process time, the pressure rises up to the setpoint
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