Problem drytek4 SNF 2006-04-04 15:23:38: process pressure less than setpoint

crichter at snf.stanford.edu crichter at snf.stanford.edu
Tue Apr 4 15:23:39 PDT 2006


Pressure stops at 90mTorr while the setpoint was set at 100mTorr.  After about 10 seconds into the process time, the pressure rises up to the setpoint




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