Shutdown drytek4 SNF 2006-08-08 09:52:54: Tuning fix only works for SF6 (i.e. for low voltages)

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Tue Aug 8 09:52:55 PDT 2006


Only SF6 can be tuned by the "semi-automatic" procedure.  Other gases (O2 or CHF3-O2) with higher voltages give high reflected and "flickering" plasma.




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