Shutdown drytek4 SNF 2006-08-08 09:52:54: Tuning fix only works for SF6 (i.e. for low voltages)

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Aug 8 14:37:07 PDT 2006


Adjusted the vacuum capacitors so that they cover a wider range.  Ran O2 , O2 + CHF3 and SF6 recipes.  At 100W forward power, the reflected was 5 W for the O2 and O2 +CHF3 recipes. The SF6 recipe was OW.




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