From whu2003 at snf.stanford.edu Thu Dec 7 23:22:13 2006 From: whu2003 at snf.stanford.edu (whu2003 at snf.stanford.edu) Date: Thu, 7 Dec 2006 23:22:13 -0800 Subject: Problem drytek4 SNF 2006-12-07 23:22:13: problem with drytek4 Message-ID: CYCLE HOLD, CLEAR WAFER and STANDBY buttons do not work; Chamber can not be opened. From jperez at snf.stanford.edu Fri Dec 8 07:28:24 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 8 Dec 2006 07:28:24 -0800 Subject: Problem drytek4 SNF 2006-12-07 23:22:13: problem with drytek4 Message-ID: Standby pressure was too high. Caesar made the adjustment. From mwiemer at snf.stanford.edu Mon Dec 11 08:01:20 2006 From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu) Date: Mon, 11 Dec 2006 08:01:20 -0800 Subject: Problem drytek4 SNF 2006-12-11 08:01:20: pump? Message-ID: Maybe the pump is dying? Drytek wont run. -Mike From cbaxter at snf.stanford.edu Mon Dec 11 10:01:29 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 11 Dec 2006 10:01:29 -0800 Subject: Problem drytek4 SNF 2006-12-11 08:01:20: pump? Message-ID: Elmer drained the oil and I refilled with fresh white and also, refilled blower with white oil. From mahnaz at snf.stanford.edu Mon Dec 11 11:43:45 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 11 Dec 2006 11:43:45 -0800 Subject: Shutdown drytek4 SNF 2006-12-11 11:43:44: not venting Message-ID: From cbaxter at snf.stanford.edu Mon Dec 11 12:38:33 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 11 Dec 2006 12:38:33 -0800 Subject: Shutdown drytek4 SNF 2006-12-11 11:43:44: not venting Message-ID: Switched toggle switch to vent position. From cbaxter at snf.stanford.edu Mon Dec 11 13:15:02 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 11 Dec 2006 13:15:02 -0800 Subject: Shutdown drytek4 SNF 2006-12-11 13:15:02: Edward 80 pump is bad,,, Message-ID: From jperez at snf.stanford.edu Tue Dec 12 10:38:32 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 12 Dec 2006 10:38:32 -0800 Subject: Problem drytek4 SNF 2006-12-12 10:38:31: No O2 flowing when switched on. Message-ID: From jperez at snf.stanford.edu Tue Dec 12 10:58:01 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 12 Dec 2006 10:58:01 -0800 Subject: Shutdown drytek4 SNF 2006-12-11 13:15:02: Edward 80 pump is bad,,, Message-ID: Replaced pump and testing system for O2 flow. From jimkruger at snf.stanford.edu Tue Dec 12 11:21:44 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 12 Dec 2006 11:21:44 -0800 Subject: Shutdown drytek4 SNF 2006-12-12 11:21:43: O2 flow OK, RF tune not responding Message-ID: From cbaxter at snf.stanford.edu Tue Dec 12 15:43:27 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 12 Dec 2006 15:43:27 -0800 Subject: Comment drytek4 SNF 2006-12-12 15:43:23: The lower adjustable resistor pot is open(bad). Message-ID: From cbaxter at snf.stanford.edu Wed Dec 13 15:36:53 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 13 Dec 2006 15:36:53 -0800 Subject: Shutdown drytek4 SNF 2006-12-12 11:21:43: O2 flow OK, RF tune not responding Message-ID: Changed lower tuning pot on the rf match and also found one of the dip switch was set wrong , this disable the o2 flow for channel 1 process. From cbaxter at snf.stanford.edu Wed Dec 13 15:36:59 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 13 Dec 2006 15:36:59 -0800 Subject: Comment drytek4 SNF 2006-12-12 15:43:23: The lower adjustable resistor pot is open(bad). Message-ID: From cbaxter at snf.stanford.edu Wed Dec 13 15:37:04 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 13 Dec 2006 15:37:04 -0800 Subject: Problem drytek4 SNF 2006-12-12 10:38:31: No O2 flowing when switched on. Message-ID: From jimkruger at snf.stanford.edu Sat Dec 16 15:06:56 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Sat, 16 Dec 2006 15:06:56 -0800 Subject: Problem drytek4 SNF 2006-12-16 15:06:55: Wafer lift "popping" Message-ID: Wafer lift pops up at end of vent. It broke 2 wafers before I learned not to load near it. From cbaxter at snf.stanford.edu Wed Dec 20 09:50:01 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 20 Dec 2006 09:50:01 -0800 Subject: Problem drytek4 SNF 2006-12-16 15:06:55: Wafer lift "popping" Message-ID: adjusted lifterr