From crichter at snf.stanford.edu Mon Feb 6 14:47:22 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Mon, 6 Feb 2006 14:47:22 -0800 Subject: Problem drytek4 SNF 2006-02-06 14:47:21: standby pressure at 170mTorr when shutting down after use Message-ID: I believe it should be around in the 200 mTorr range. Otherwise, the machine works fine From cbaxter at snf.stanford.edu Mon Feb 6 15:40:27 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Feb 2006 15:40:27 -0800 Subject: Problem drytek4 SNF 2006-02-06 14:47:21: standby pressure at 170mTorr when shutting down after use Message-ID: adjusted stand by pressure to 250mt From swkim at snf.stanford.edu Tue Feb 7 23:04:04 2006 From: swkim at snf.stanford.edu (swkim at snf.stanford.edu) Date: Tue, 7 Feb 2006 23:04:04 -0800 Subject: Problem drytek4 SNF 2006-02-07 23:04:04: low pressure Message-ID: stanby pressure is low, around 160mTorr. From cbaxter at snf.stanford.edu Wed Feb 8 08:04:14 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 8 Feb 2006 08:04:14 -0800 Subject: Problem drytek4 SNF 2006-02-07 23:04:04: low pressure Message-ID: adjusted regulator valve for stand by pressure From crichter at snf.stanford.edu Sat Feb 11 13:27:10 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Sat, 11 Feb 2006 13:27:10 -0800 Subject: Problem drytek4 SNF 2006-02-11 13:27:09: Pressure Readings Not Stable Message-ID: I'm running O2 for a cleaning step. I noticed that at 100mTorr, the pressures fluctuate from 98-104mTorr. From crichter at snf.stanford.edu Sat Feb 11 13:37:32 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Sat, 11 Feb 2006 13:37:32 -0800 Subject: Problem drytek4 SNF 2006-02-11 13:37:32: Standby Pressure Reading Low Message-ID: When putting the system in standby, the pressure reading was 16-22MTorr instead of the usual ~200mTorr From crichter at snf.stanford.edu Sat Feb 11 13:39:34 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Sat, 11 Feb 2006 13:39:34 -0800 Subject: Problem drytek4 SNF 2006-02-11 13:39:34: Correction... Message-ID: I had the caps lock when reporting the current standby pressure. Its 16-22mTorr (not MTorr) From eenriquez at snf.stanford.edu Sun Feb 12 07:08:14 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 12 Feb 2006 07:08:14 -0800 Subject: Problem drytek4 SNF 2006-02-11 13:39:34: Correction... Message-ID: From eenriquez at snf.stanford.edu Sun Feb 12 08:33:25 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 12 Feb 2006 08:33:25 -0800 Subject: Problem drytek4 SNF 2006-02-11 13:37:32: Standby Pressure Reading Low Message-ID: Adjusted the foreline purge valve. From cbaxter at snf.stanford.edu Mon Feb 13 08:00:18 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 13 Feb 2006 08:00:18 -0800 Subject: Problem drytek4 SNF 2006-02-11 13:27:09: Pressure Readings Not Stable Message-ID: re-cal throttle valve. From cbaxter at snf.stanford.edu Fri Feb 17 18:40:34 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 17 Feb 2006 18:40:34 -0800 Subject: Shutdown drytek4 SNF 2006-02-17 18:40:34: lifter error on chamber b Message-ID: From cbaxter at snf.stanford.edu Fri Feb 17 18:41:03 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 17 Feb 2006 18:41:03 -0800 Subject: Shutdown drytek4 SNF 2006-02-17 18:41:02: lifter error on chamber b Message-ID: From cbaxter at snf.stanford.edu Fri Feb 17 18:41:36 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 17 Feb 2006 18:41:36 -0800 Subject: Shutdown drytek4 SNF 2006-02-17 18:41:02: lifter error on chamber b Message-ID: sorry wrong tool From cbaxter at snf.stanford.edu Fri Feb 17 18:41:47 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 17 Feb 2006 18:41:47 -0800 Subject: Shutdown drytek4 SNF 2006-02-17 18:40:34: lifter error on chamber b Message-ID: From jimkruger at snf.stanford.edu Mon Feb 20 12:33:23 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 20 Feb 2006 12:33:23 -0800 Subject: Problem drytek4 SNF 2006-02-20 12:33:23: lower electrode water flow LOW Message-ID: I would not use it except at low power. I would "shutdown" except for the long weekend. From cbaxter at snf.stanford.edu Mon Feb 20 18:43:53 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 20 Feb 2006 18:43:53 -0800 Subject: Problem drytek4 SNF 2006-02-20 12:33:23: lower electrode water flow LOW Message-ID: there alot water flow going through the lower electrode, don't know where Jim is checking the water flow?. From jperez at snf.stanford.edu Fri Feb 24 09:47:21 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 24 Feb 2006 09:47:21 -0800 Subject: Shutdown drytek4 SNF 2006-02-24 09:47:21: Not getting any pressure reading during setup Message-ID: Tried process 1 and process 2 From eenriquez at snf.stanford.edu Fri Feb 24 11:14:13 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Feb 2006 11:14:13 -0800 Subject: Shutdown drytek4 SNF 2006-02-24 09:47:21: Not getting any pressure reading during setup Message-ID: Pressure controller was set on "open" instead of "ext". Turned knob to ext. From swkim at snf.stanford.edu Mon Feb 27 11:29:48 2006 From: swkim at snf.stanford.edu (swkim at snf.stanford.edu) Date: Mon, 27 Feb 2006 11:29:48 -0800 Subject: Problem drytek4 SNF 2006-02-27 11:29:47: #3 gas flow not working Message-ID: the gas flow of Freon 23 doesn't rise up at all. i turn the nub all the way, but it wouldn't increase. From cbaxter at snf.stanford.edu Mon Feb 27 13:14:56 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 27 Feb 2006 13:14:56 -0800 Subject: Problem drytek4 SNF 2006-02-27 11:29:47: #3 gas flow not working Message-ID: opened manual shutoff valve and flowed chf3 at 20,40,60 and 100% without a problem.