Problem drytek4 SNF 2006-02-11 13:27:09: Pressure Readings Not Stable

crichter at snf.stanford.edu crichter at snf.stanford.edu
Sat Feb 11 13:27:10 PST 2006


I'm running O2 for a cleaning step. I noticed that at 100mTorr, the pressures fluctuate from 98-104mTorr. 




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