From hansj at snf.stanford.edu  Sat Jun  3 11:04:51 2006
From: hansj at snf.stanford.edu (hansj at snf.stanford.edu)
Date: Sat, 3 Jun 2006 11:04:51 -0700
Subject: Problem drytek4 SNF 2006-06-03 11:04:51: cannot use the machine
Message-ID: <mailman.288.1357938324.25694.drytek4-pcs@snf.stanford.edu>

cannot purge the chamber
cannot run any process(cycle start has no response)



From eenriquez at snf.stanford.edu  Sun Jun  4 09:11:21 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Sun, 4 Jun 2006 09:11:21 -0700
Subject: Problem drytek4 SNF 2006-06-03 11:04:51: cannot use the machine
Message-ID: <mailman.289.1357938324.25694.drytek4-pcs@snf.stanford.edu>

No problem found.  Ran several process cycles without any problem.



From jimkruger at snf.stanford.edu  Tue Jun 20 11:13:11 2006
From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu)
Date: Tue, 20 Jun 2006 11:13:11 -0700
Subject: Problem drytek4 SNF 2006-06-20 11:13:11: Pressure head noisy, still drifting negative
Message-ID: <mailman.290.1357938324.25694.drytek4-pcs@snf.stanford.edu>

Do we have a replacement?



From hansj at snf.stanford.edu  Wed Jun 28 15:41:35 2006
From: hansj at snf.stanford.edu (hansj at snf.stanford.edu)
Date: Wed, 28 Jun 2006 15:41:35 -0700
Subject: Problem drytek4 SNF 2006-06-28 15:41:34: pressure not stable
Message-ID: <mailman.291.1357938324.25694.drytek4-pcs@snf.stanford.edu>

reading is jumping around