Problem drytek4 SNF 2006-03-14 10:49:34: Chamber has an imprint (stain) of 4" wafer

crichter at snf.stanford.edu crichter at snf.stanford.edu
Tue Mar 14 10:49:34 PST 2006


The bottom of the chamber where the wafer is placed has a tan colored imprint of a 4" wafer




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