Shutdown drytek4 SNF 2006-03-27 14:02:47: water on the wafer stage and some bad smell from the chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Mar 29 22:57:37 PST 2006


Replaced o-rings in the showerhead.  Ran 30 O2 plasma.




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