Problem drytek4 SNF 2006-03-27 13:36:06: chamber pressure is not stable

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Mar 29 22:58:31 PST 2006


Water leak was causing the pressue to jump around.  Replaced o-rings in the showerhead.  Ran 30 O2 plasma.




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