Shutdown drytek4 SNF 2006-03-30 11:46:10: Air Leak

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Mar 30 11:46:10 PST 2006

Previous message: Shutdown drytek4 SNF 2006-03-27 14:02:47: water on the wafer stage and some bad smell from the chamber
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Tried to purge shared gas line, but chamber pressure wouldn't
drop to below 20 mTorr.

Previous message: Shutdown drytek4 SNF 2006-03-27 14:02:47: water on the wafer stage and some bad smell from the chamber
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