From jperez at snf.stanford.edu Tue Oct 3 10:48:16 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 Oct 2006 10:48:16 -0700 Subject: Shutdown drytek4 SNF 2006-10-03 10:48:16: Wafer moving off to bottom right side of plate before plasma starts Message-ID: Wafer won't stay in center. From cbaxter at snf.stanford.edu Tue Oct 3 11:36:44 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 3 Oct 2006 11:36:44 -0700 Subject: Shutdown drytek4 SNF 2006-10-03 10:48:16: Wafer moving off to bottom right side of plate before plasma starts Message-ID: Elmer found the air line for the lifter disconnected. From hansj at snf.stanford.edu Mon Oct 30 17:06:45 2006 From: hansj at snf.stanford.edu (hansj at snf.stanford.edu) Date: Mon, 30 Oct 2006 17:06:45 -0800 Subject: Problem drytek4 SNF 2006-10-30 17:06:44: Not working Message-ID: From jimkruger at snf.stanford.edu Mon Oct 30 19:39:30 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 30 Oct 2006 19:39:30 -0800 Subject: Shutdown drytek4 SNF 2006-10-30 19:39:29: Dead Pump? Message-ID: Sytsem is vented with the main valve open. No "pump sounds" so the pumps must be off. The pump lights are on. From eenriquez at snf.stanford.edu Tue Oct 31 08:17:19 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Oct 2006 08:17:19 -0800 Subject: Shutdown drytek4 SNF 2006-10-30 19:39:29: Dead Pump? Message-ID: Reset the circuit breaker and restarted pump. No problem after 45 min. Cycled the system with no problems. From eenriquez at snf.stanford.edu Tue Oct 31 08:17:41 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Oct 2006 08:17:41 -0800 Subject: Problem drytek4 SNF 2006-10-30 17:06:44: Not working Message-ID: Reset the circuit breaker and re-started pump.