From ofidaner at snf.stanford.edu  Sat Apr 14 17:58:14 2007
From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu)
Date: Sat, 14 Apr 2007 17:58:14 -0700
Subject: Problem drytek4 SNF 2007-04-14 17:58:14: RF power flickers
Message-ID: <mailman.427.1357938325.25694.drytek4-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Mon Apr 16 06:55:44 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 16 Apr 2007 06:55:44 -0700
Subject: Comment drytek4 SNF 2007-03-28 18:30:00: Update
Message-ID: <mailman.428.1357938325.25694.drytek4-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Mon Apr 16 08:55:39 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 16 Apr 2007 08:55:39 -0700
Subject: Problem drytek4 SNF 2007-04-14 17:58:14: RF power flickers
Message-ID: <mailman.429.1357938325.25694.drytek4-pcs@snf.stanford.edu>

No problem found.  Ran user's recipe for 9 minutes with no problems.



From mislam at snf.stanford.edu  Wed Apr 18 10:54:09 2007
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Wed, 18 Apr 2007 10:54:09 -0700
Subject: Problem drytek4 SNF 2007-04-18 10:54:08: RF tunning problem
Message-ID: <mailman.430.1357938325.25694.drytek4-pcs@snf.stanford.edu>

RF flickers, won't tune



From eenriquez at snf.stanford.edu  Wed Apr 18 16:00:07 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 18 Apr 2007 16:00:07 -0700
Subject: Problem drytek4 SNF 2007-04-18 10:54:08: RF tunning problem
Message-ID: <mailman.431.1357938325.25694.drytek4-pcs@snf.stanford.edu>

Ran user's recipe with no problem.



From jperez at snf.stanford.edu  Fri Apr 20 15:03:18 2007
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 20 Apr 2007 15:03:18 -0700
Subject: Problem drytek4 SNF 2007-04-20 15:03:17: intermittent plasma flickering problem
Message-ID: <mailman.432.1357938325.25694.drytek4-pcs@snf.stanford.edu>

Process 1 OK when O2 process starts, but once you make 
an adjustment (pressure/power) and try to tune reflective 
power flickering started and uncontrollable. Could Not tune.
Switched to Process 2, changed the bare minimal and was 
able to keep plasma steady. It seems that higherw pressure 
helped (150mTorr) and a lower power (75 watts).



From cbaxter at snf.stanford.edu  Mon Apr 23 07:59:49 2007
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 23 Apr 2007 07:59:49 -0700
Subject: Problem drytek4 SNF 2007-04-20 15:03:17: intermittent plasma flickering problem
Message-ID: <mailman.433.1357938325.25694.drytek4-pcs@snf.stanford.edu>

I was able to tuned with lower pressure w/out problem.