Problem drytek4 SNF 2007-04-20 15:03:17: intermittent plasma flickering problem

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Apr 20 15:03:18 PDT 2007


Process 1 OK when O2 process starts, but once you make 
an adjustment (pressure/power) and try to tune reflective 
power flickering started and uncontrollable. Could Not tune.
Switched to Process 2, changed the bare minimal and was 
able to keep plasma steady. It seems that higherw pressure 
helped (150mTorr) and a lower power (75 watts).




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