Problem drytek4 SNF 2007-08-20 09:09:50: C4F8 is very low

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Aug 21 14:57:38 PDT 2007


New C4F8 cylinder has been installed.  Ran process for 5 minutes with no problems.  Plasma color is now blue. 




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