Shutdown drytek4 SNF 2007-02-20 11:49:36: Pressure at >450 mT, won't vent!

jperez at snf.stanford.edu jperez at snf.stanford.edu
Tue Feb 20 11:49:37 PST 2007


Tried resetting mico processor. pressed end cycle and still not able to vent. Don't know what else to do.
Susie Sun's wafer inside.




More information about the drytek4-pcs mailing list