Comment drytek4 SNF 2007-02-20 13:42:05: Chamber not pumping down

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Feb 20 13:42:06 PST 2007


Unloaded the user's wafers.  Chamber leak rate is < 10 mT/min.  Pump oil might be contaminated.  Chamber pumps down initialy to < 50 mT but pressure slowly increases to about 600 mT.  Need further troubleshooting.




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