Comment drytek4 SNF 2007-02-20 13:42:05: Chamber not pumping down

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Feb 21 13:53:07 PST 2007


Ran O2 plasma clean for over 1 hour.  Pumped down and vented chamber many times without any problems.




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