From jperez at snf.stanford.edu  Tue Jan  2 15:08:40 2007
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 2 Jan 2007 15:08:40 -0800
Subject: Shutdown drytek4 SNF 2007-01-02 15:08:39: The lower electrode water flow is below its mark
Message-ID: <mailman.378.1357938325.25694.drytek4-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Tue Jan  2 15:31:04 2007
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 2 Jan 2007 15:31:04 -0800
Subject: Shutdown drytek4 SNF 2007-01-02 15:31:03: Lower left panel one of the 4 buttons is off
Message-ID: <mailman.379.1357938325.25694.drytek4-pcs@snf.stanford.edu>

BLOWER



From eenriquez at snf.stanford.edu  Wed Jan  3 08:09:06 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 3 Jan 2007 08:09:06 -0800
Subject: Shutdown drytek4 SNF 2007-01-02 15:31:03: Lower left panel one of the 4 buttons is off
Message-ID: <mailman.380.1357938325.25694.drytek4-pcs@snf.stanford.edu>

Replaced burnt indicator lamp



From eenriquez at snf.stanford.edu  Wed Jan  3 08:09:38 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 3 Jan 2007 08:09:38 -0800
Subject: Shutdown drytek4 SNF 2007-01-02 15:08:39: The lower electrode water flow is below its mark
Message-ID: <mailman.381.1357938325.25694.drytek4-pcs@snf.stanford.edu>

water flow is ok



From jimkruger at snf.stanford.edu  Thu Jan  4 16:44:20 2007
From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu)
Date: Thu, 4 Jan 2007 16:44:20 -0800
Subject: Problem drytek4 SNF 2007-01-04 16:44:20: lift popped; broke another wafer
Message-ID: <mailman.382.1357938325.25694.drytek4-pcs@snf.stanford.edu>

about 10 or 12 runs were ok, then the lift popped, breaking a wafer.  a test run after was ok.



From cbaxter at snf.stanford.edu  Fri Jan  5 08:53:27 2007
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 5 Jan 2007 08:53:27 -0800
Subject: Problem drytek4 SNF 2007-01-04 16:44:20: lift popped; broke another wafer
Message-ID: <mailman.383.1357938325.25694.drytek4-pcs@snf.stanford.edu>

lower air supply for lifter.



From jimkruger at snf.stanford.edu  Wed Jan 17 11:19:47 2007
From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu)
Date: Wed, 17 Jan 2007 11:19:47 -0800
Subject: Problem drytek4 SNF 2007-01-17 11:19:47: Lamps burned out
Message-ID: <mailman.384.1357938325.25694.drytek4-pcs@snf.stanford.edu>

Process 2 and Process 3 lamps burned out.



From cbaxter at snf.stanford.edu  Wed Jan 17 13:00:25 2007
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 17 Jan 2007 13:00:25 -0800
Subject: Problem drytek4 SNF 2007-01-17 11:19:47: Lamps burned out
Message-ID: <mailman.385.1357938325.25694.drytek4-pcs@snf.stanford.edu>

Changed lamps and tuned rf match.



From angiel at snf.stanford.edu  Wed Jan 17 17:05:20 2007
From: angiel at snf.stanford.edu (angiel at snf.stanford.edu)
Date: Wed, 17 Jan 2007 17:05:20 -0800
Subject: Problem drytek4 SNF 2007-01-17 17:05:19: O2 flow unstable
Message-ID: <mailman.386.1357938325.25694.drytek4-pcs@snf.stanford.edu>

O2 flow fluctuating a lot and sometimes only going to 70%



From angiel at snf.stanford.edu  Wed Jan 17 17:13:13 2007
From: angiel at snf.stanford.edu (angiel at snf.stanford.edu)
Date: Wed, 17 Jan 2007 17:13:13 -0800
Subject: Comment drytek4 SNF 2007-01-17 17:13:13: 02 problem
Message-ID: <mailman.387.1357938325.25694.drytek4-pcs@snf.stanford.edu>

Seems like O2 only fluctuates when RF is on.



From cbaxter at snf.stanford.edu  Thu Jan 18 08:36:51 2007
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 18 Jan 2007 08:36:51 -0800
Subject: Problem drytek4 SNF 2007-01-17 17:05:19: O2 flow unstable
Message-ID: <mailman.388.1357938325.25694.drytek4-pcs@snf.stanford.edu>

Flowed o2 for 10mins w/out problem