Problem drytek4 SNF 2007-01-04 16:44:20: lift popped; broke another wafer

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Thu Jan 4 16:44:20 PST 2007


about 10 or 12 runs were ok, then the lift popped, breaking a wafer.  a test run after was ok.




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