Problem drytek4 SNF 2007-06-18 18:22:51: no gas flow

dkozak at snf.stanford.edu dkozak at snf.stanford.edu
Mon Jun 18 18:22:51 PDT 2007


Have run Process2 with gases 1 and 3 (F116 and SF6).  Gas flow meters show no flow(+001 and -00.2).  Pressure (set for 200) is showing as  -0009.   Have put machine in stand-by mode, started up again using Process1.  Same problem.  No plasma striking.  Will put machine in yellow mode (may need red?)




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