Problem drytek4 SNF 2007-06-27 18:12:22: variation in O2 flow controller

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jun 28 08:53:50 PDT 2007


Wrapped the O2 MFC cable with aluminum foil.  Ran O2 plasma for 5 min with no problems.  Flow reading dropped about 1 sccm when the RF was turned on.




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