From jperez at snf.stanford.edu Fri Mar 2 07:38:56 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 2 Mar 2007 07:38:56 -0800 Subject: Comment drytek4 SNF 2007-03-02 07:38:56: The part that is bad on Matching network is on order,due in next week Message-ID: From cbaxter at snf.stanford.edu Mon Mar 12 12:45:07 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 12 Mar 2007 12:45:07 -0700 Subject: Shutdown drytek4 SNF 2007-02-28 19:19:41: No plasma or RF matching Message-ID: Installed new vacuum variable capacitor and also repaired shorted -16vdc to ground. Run 10mins o2 plasma w/out problem. From cbaxter at snf.stanford.edu Mon Mar 12 12:45:20 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 12 Mar 2007 12:45:20 -0700 Subject: Comment drytek4 SNF 2007-03-02 07:38:56: The part that is bad on Matching network is on order,due in next week Message-ID: From cbaxter at snf.stanford.edu Mon Mar 12 12:45:26 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 12 Mar 2007 12:45:26 -0700 Subject: Comment drytek4 SNF 2007-02-26 15:41:34: Installed newly rebuild blower Message-ID: From jimkruger at snf.stanford.edu Tue Mar 13 17:32:54 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 13 Mar 2007 17:32:54 -0700 Subject: Problem drytek4 SNF 2007-03-13 17:32:53: Manometer leaks up when chamber is vented Message-ID: Less serious if it is a leak across the isolation valve. More serios if a leak into the manometer. Please Don't leave chamber vented for many minutes until this is resolved. Either running a dummy process or in standby. From cbaxter at snf.stanford.edu Wed Mar 14 08:19:05 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 14 Mar 2007 08:19:05 -0700 Subject: Problem drytek4 SNF 2007-03-13 17:32:53: Manometer leaks up when chamber is vented Message-ID: I disconnect the air supply to the nupro that isolate the manometer and watch monitor pressure, I did not see any rise pressure. From rik at snf.stanford.edu Wed Mar 14 11:40:48 2007 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Wed, 14 Mar 2007 11:40:48 -0700 Subject: Comment drytek4 SNF 2007-03-14 11:40:48: Process 1: Could not get reflected power below 20W Message-ID: While performing an O2 clean using process 1, I was unable to get the reflected power below 20W by tuning the cap coil. Unsure if this is a system problem or just my bad luck. From jimkruger at yahoo.com Wed Mar 14 12:58:44 2007 From: jimkruger at yahoo.com (jim kruger) Date: Wed, 14 Mar 2007 12:58:44 -0700 (PDT) Subject: Comment drytek4 SNF 2007-03-14 11:40:48: Process 1: Could not get reflected power below 20W In-Reply-To: <20070314184048.EA1354C900@smtp2.stanford.edu> Message-ID: <484668.63561.qm@web38911.mail.mud.yahoo.com> This was my experience as well at 100 watts. I was OK at 50 wattss. The lower tuning cap seems to be at the end of the potentiometer span. Cesar: Perhaps shifting position of the shaft before tightening the set-screw will fix this. Which direction? jim --- rik at snf.stanford.edu wrote: > While performing an O2 clean using process 1, I was > unable to get the reflected power below 20W by > tuning the cap coil. Unsure if this is a system > problem or just my bad luck. > > ____________________________________________________________________________________ Bored stiff? Loosen up... Download and play hundreds of games for free on Yahoo! Games. http://games.yahoo.com/games/front From sqliu at snf.stanford.edu Fri Mar 16 04:41:13 2007 From: sqliu at snf.stanford.edu (sqliu at snf.stanford.edu) Date: Fri, 16 Mar 2007 04:41:13 -0700 Subject: Problem drytek4 SNF 2007-03-16 04:41:12: unable to get steady plasma Message-ID: plasma flashes on and off without stabilizing From cbaxter at snf.stanford.edu Fri Mar 16 07:58:42 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 16 Mar 2007 07:58:42 -0700 Subject: Problem drytek4 SNF 2007-03-16 04:41:12: unable to get steady plasma Message-ID: Using o2 gas and recipe#2 and was able to strike plasma w/out problem. From cbaxter at snf.stanford.edu Fri Mar 16 07:59:08 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 16 Mar 2007 07:59:08 -0700 Subject: Comment drytek4 SNF 2007-03-14 11:40:48: Process 1: Could not get reflected power below 20W Message-ID: From jperez at snf.stanford.edu Wed Mar 21 09:51:46 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 21 Mar 2007 09:51:46 -0700 Subject: Problem drytek4 SNF 2007-03-21 09:51:45: Process 1 plasma flickering, used process2 Message-ID: From jperez at snf.stanford.edu Wed Mar 21 09:52:36 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 21 Mar 2007 09:52:36 -0700 Subject: Problem drytek4 SNF 2007-03-21 09:52:35: Process 2 couldn't get reverse power below7 Message-ID: From cbaxter at snf.stanford.edu Wed Mar 21 10:15:35 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 21 Mar 2007 10:15:35 -0700 Subject: Shutdown drytek4 SNF 2007-03-21 10:15:35: RF problem Message-ID: From cbaxter at snf.stanford.edu Wed Mar 21 13:40:58 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 21 Mar 2007 13:40:58 -0700 Subject: Shutdown drytek4 SNF 2007-03-21 10:15:35: RF problem Message-ID: Adjusted tuning vacuum variable cap. From cbaxter at snf.stanford.edu Wed Mar 21 13:41:06 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 21 Mar 2007 13:41:06 -0700 Subject: Problem drytek4 SNF 2007-03-21 09:52:35: Process 2 couldn't get reverse power below7 Message-ID: From cbaxter at snf.stanford.edu Wed Mar 21 13:41:15 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 21 Mar 2007 13:41:15 -0700 Subject: Problem drytek4 SNF 2007-03-21 09:51:45: Process 1 plasma flickering, used process2 Message-ID: From angiel at snf.stanford.edu Wed Mar 28 11:52:55 2007 From: angiel at snf.stanford.edu (angiel at snf.stanford.edu) Date: Wed, 28 Mar 2007 11:52:55 -0700 Subject: Problem drytek4 SNF 2007-03-28 11:52:55: no O2 plasma Message-ID: Couldn't get O2 plasma to light and reverse RF power would not go down. It just matched forward power regardless of turning the process knobs. From cbaxter at snf.stanford.edu Wed Mar 28 14:21:40 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 28 Mar 2007 14:21:40 -0700 Subject: Problem drytek4 SNF 2007-03-28 11:52:55: no O2 plasma Message-ID: Adjusted matching network to lowest reflective and also set both variable caps to zero phase. From bashar at snf.stanford.edu Wed Mar 28 17:19:59 2007 From: bashar at snf.stanford.edu (bashar at snf.stanford.edu) Date: Wed, 28 Mar 2007 17:19:59 -0700 Subject: Problem drytek4 SNF 2007-03-28 17:19:59: No O2/SF6 Plasma Message-ID: The rf tuner didnt respond to turning any of the processes. From bashar at snf.stanford.edu Wed Mar 28 17:20:18 2007 From: bashar at snf.stanford.edu (bashar at snf.stanford.edu) Date: Wed, 28 Mar 2007 17:20:18 -0700 Subject: Shutdown drytek4 SNF 2007-03-28 17:20:17: no plasma Message-ID: From eenriquez at snf.stanford.edu Wed Mar 28 18:30:00 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Mar 2007 18:30:00 -0700 Subject: Comment drytek4 SNF 2007-03-28 18:30:00: Update Message-ID: Tuning motor keeps turning. Looks like the position potentiometer is defective. Need to troubleshoot further. From cbaxter at snf.stanford.edu Thu Mar 29 08:51:51 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 29 Mar 2007 08:51:51 -0700 Subject: Shutdown drytek4 SNF 2007-03-28 17:20:17: no plasma Message-ID: Tighten set screw on shaft drive and tuned rf manually w/out problem. From cbaxter at snf.stanford.edu Thu Mar 29 08:51:59 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 29 Mar 2007 08:51:59 -0700 Subject: Problem drytek4 SNF 2007-03-28 17:19:59: No O2/SF6 Plasma Message-ID: