From jimkruger at snf.stanford.edu Thu Nov 1 09:34:56 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 1 Nov 2007 09:34:56 -0700 Subject: Problem drytek4 SNF 2007-11-01 09:34:56: Air leak-way out of spec; 1177 mTorr/min. Message-ID: This is about the same leak I have measured 3 days running. Way out of spec. System may be OK for non-critical O2 cleaning but any etch recipe will be affected. Leak amounts to about 11 sccm of air added to any recipe. From cbaxter at snf.stanford.edu Tue Nov 6 10:06:52 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 6 Nov 2007 10:06:52 -0800 Subject: Shutdown drytek4 SNF 2007-11-06 10:06:51: lower flex foreline bellow is cracked Message-ID: From cbaxter at snf.stanford.edu Tue Nov 6 11:46:06 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 6 Nov 2007 11:46:06 -0800 Subject: Shutdown drytek4 SNF 2007-11-06 10:06:51: lower flex foreline bellow is cracked Message-ID: Changed cracked foreline bellow and checked rate of rise is @8mt per min. From cbaxter at snf.stanford.edu Tue Nov 6 11:46:26 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 6 Nov 2007 11:46:26 -0800 Subject: Problem drytek4 SNF 2007-11-01 09:34:56: Air leak-way out of spec; 1177 mTorr/min. Message-ID: Changed cracked foreline bellow. From yeh at snf.stanford.edu Mon Nov 12 23:17:29 2007 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Mon, 12 Nov 2007 23:17:29 -0800 Subject: Problem drytek4 SNF 2007-11-12 23:17:29: o2 plasma not stable Message-ID: 100W forward with 50W min. rev power. can't seem to reduce reverse power. plasma not stable. From cbaxter at snf.stanford.edu Tue Nov 13 11:34:59 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 13 Nov 2007 11:34:59 -0800 Subject: Problem drytek4 SNF 2007-11-12 23:17:29: o2 plasma not stable Message-ID: Changed opened filter cap and also, repaired air leak on air manifold (cracked elbow fitting)