Shutdown drytek4 SNF 2008-04-25 13:37:33: Water flow to lower electrode is low

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Apr 25 14:43:47 PDT 2008


Should be OK to run.  Previous test shows that even at a flow rate of 0.3gpm,  the outlet temperature only increased by 7 C after running 175W plasma for 35 min.
Please run a dummy wafer to verify your process before comitting your device.




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